Device for measuring relative displacement between plural light sources and a scale utilizing frequency multiplexing



0 United States Patent [1113,551,682

[72] Inventors Jean-Claue Kerhoas [51] Int. Cl 601!) 11/04, Choisy-le-Roi GOZf 1/28, H01j 39/12 Michel Paul Marie Metayer, Chilly- [50] Field of Search 356/167, Mazarin; James Remy Albert Teboul, 170; 250/214, 217, 217SSL, 227, 237 Montrouge, France [21] Appl. No. 817,395 [56] References Cited [22] Filed Apr. 18, 1969 UNITED STATES PATENTS I 1 Patented Dec-29,1970 3,502,415 3/1970 Hock 356/167 [73] Assignee Compagnie Des Compteurs FOREIGN PATENTS Paris, France acompany ofFrance 1,240,962 8/1960 France 356/167 Priority PB 26, 1968 Primary Examiner-James W. Lawrence 1 France Assistant Examiner-T. N. Grigsby [31 149562 Attorney-Pierce, Scheffler & Parker [54] DEVICE FOR MEASURING RELATIVE QBSITRACT: t1? PhOIOBiCCUiIC dev te ;Ol' tI}l]le3SLl l;;llg rilalrtlve DISPLACEMENT BETWEEN PLURAL LIGHT f m" 2 a e g f f fl i "f SOURCES AND A SCALE UTILIZING FREQUENCY an t e image 0 a source on t e sca e in w to e source 15 MULTIPLEXING constituted by two electroluminescent diodes modulated by 6 Claims 13 Drawin Fi s two different frequencies, the image of the source being g g received by a single photoelectric receiver provided with de- [52] U.S. Cl 250/214, tecting means, the two detected frequencies actuating numbering means.

Zfk'ijf" m h-p 'Ampli/iagfgz 7 10 R R 2 216 1' Source Amplifier Z4 i/fer' Fi/ er I 5 I /s 2 l5k /e 6 Defecfar DeIec/br JUL/A nILF fiefer /27 PATENTEU UEB29 I978 SHEET 1 OF 6 FiC-R PATENTED UECZS 19m SHEET 3 BF 6 DEVICE FOR MEASURING RELATIVE DISPLACEMENT BETWEEN PLURAL LIGHT SOURCES ANDA SCALE UTILIZING FREQUENCY MULTIPLEXING devices generally use a filament lamp providing a pencil of light which is optically projected on to a diffraction network or webs.

n uThese known devices have a certain number of disad vantages. On the one hand, the soliiu ii -qconsisting of using .two webs or two diffraction network'simbving parallel to each lating the luminous flux as wellas the impossibility of obtaining sources of very small and well defined dimensions, hence the-necessity of providing diaphragms or masks.

1 The using has already been proposed, as light source, of an electroluminescentmodulated by the pulses'ofa generator for ,efi'ectingthe reading of a recording support, particularly a tape-or punchedcard containing data in the shape of opaque. or transparent surfaces. ln this known device, the beam of projected through the coded tracks of the recording support on a series of radiance detectors whose output signals are amplified by an amplifier tuned on the repetition frequency of the pulses of the generator, and then dealt with in a conditioner;

in this known device, one does not seek to produce an image of the source on a scale, but only to detect whether the light passes or does not pass through each of the'tracks of the recording supportexplored by the flatbeam. wWhen the relative movement between source and support only occurs in one direction, and if the accuracy sought isnot' too great, this device lends itself to a static-position reading. Nevertheless, in a case where the relative displacement between light source and the support may take place in both directions before reaching a stopped position, or even never reaching it (pendular oscillations), this device is no'longer adapted to this kind of application and does not afford sufficientaccuracy.

The present invention relates to a electroluminescent diodes as light source so as-to measure displacements with very great accuracy by numbering the linesof anetwork of lines, this device, moreover, being so arranged that it-detects the displacement direction, even for the slightest displacements, to the extent of a micron.

The invention thus relates to a photoelectric measuring device of the relative displacement between a network (whose' lines are appreciably perpendicular to the displacement direction) and the image of a light source formed on this network by means of an optical system, and in which the light transmitted or reflected by the network is optically projected onto aphotoelectric receiver connected to a circuit for numbering or utilizing the lines, and this device is characterized in that said light source is constituted byat least one pair of electroluminescent diodes, modulated by currents with different modulation frequencies and that the photoelectric receiver is formed by a single junction detector followed by filtering means tuned on each of the modulation frequencies.

It is known that an electroluminescent diode is a junction diode-emitting light when a direct biasingcurrent is applied to its junction. The diode then provides a luminous power prodevice making use of source in the region of 1., orless; p

" ii the diodes afford a modulation facility by simple current lightof the diode is focalized according to a flat beam which is portionalto the current applied, and the emitted light almost is monochromatic: for instance, in the case gallium arsenide diodes, the transmission wave length is centered on 9000 Angstroer'ns, very near to infrared, p

The utilizing of at least one pair of electroluminescent diodes also has several advantages fonmeasuring displacements:

a. the diode assembly forming dimensions, in the region of 100 it so on the network, with a relatively sim source is of very slight t'it is easy to obtain, "tic, animage of this 1 injection on their'ju nction, while permitting a subsequent extre'r'nelyfsiniple. ape; sensitive detection and a high signal-tonoise ratio: for instance, one modulates fluxes emitted at frequencies of 10 Kc/s and 15 Kc/s and one detects said fluxes afterfiltering in filters having a band width of one to two hundredths of c/s and being respectively tuned on one of said frequencies. The modulation eliminates the influencie's of, parasitic light, c. thedeyice is easy to put into operation:

only comprises a scale with lines on a glass slip for instance, and the optic can berelatively distant from the scale for about 2to 3 mm. v

This device enables, by means of a network of linesregularly spaced out by a'pace of 5 p. to some hundredths of [.L according to the required accuracy, these lines being drawn on a suitablev support, for accurately measuring displacements that can be in the region of a micron or rotations with an accuracy intheregion of a-few seconds of arc.

For increasing accuracy, the distance of the images from the diodes (in the displacement direction) formed on the network by the optical system is chosen, according-to a characteristic arrangement, equal to a quarter of pace of the network, or an' entire pace number, plus a quarter.

Moreover, it is possible to increase the luminous flux comingonto the photoelectric receiver by multiplying the number of diodes, which} are associated in pairs, each pair comprising any number of diodeswhose luminous fluxes are transmitted cal image onthenetwork.

The: numbering of the lines onthe scale can be done by the reflection or transmission of the beam of light. In order to detect the displacement direction, the signals coming from two electroluminescent diodes with different modulation frequencies to be then separated on reception by filtering, areapplied to anassembly of logical circuits followed by a-reversible counter, numbering taking place in a direct or retrograde direction according to the displacement indicated by thelogical assembly. V

The accuracy in measuring the displacements means that the respective beams of light from. the two light sources are very close to each other'(a few microns). On this account, the luminous fluxes transmitted by the network, by reflection or transparency, are very close together geometrically andtheir separation by optical means would be difficult and would require a mechanical accuracy difficult to obtain. The distinguishing of the two fluxes by means of a different modulation of theirsourcesaenables reception by a single detector, thus eliminating the difficulty referred to above.

Other characteristics of the invention will be revealed by the description which follows, in relation to the accompanying drawing, given by way of nonrestrictive example, and in" which:

FIGS. land 2 are diagrams of the principle of the device according to the invention.

FIGS. 3m 5 show the relative arrangements of electroluminescent diodes.

FIG. 6 is a diagrammatical perspective view of an embodiment of one of the members of the invention.

FIGS. 7, 7a,.9 and l0f'are diagrams of the corresponding,

electric circuits s I FIG. 8 shows theshape of signals at various points of'the eff that of the lines of PM K P, that is to FIG. 11 is an electrical diagram of a characteristic element of the invention.

FIG. I2 is a diagrammatical example ofa practical embodi ment.

FIG. 1 shows an arrangement of the optical elements of the device enabling the numbering of lines to be carried out according to a method by reflection.

In the drawing, 10,10 designate electroluminescent diodes used as a light source and modulated to two different frequencies; a semireflecting plate 13 placed at 45 sends part of the luminous flux through an enlargingG objective 14 on to scale 15 comprising a network of contrasted lines 12. The lines 12 made on the scale 15 can be either thin or thick, their thickness being able, at the maximum, to attain the half-pace of the network.

A junction detector 11 or photodiode forms the input of a receiving device C whose maximal sensitiveness is tuned to the transmitting wave-length of the diodes 10,10.

These diodes are, for instance, obtained by diffusion on the same substratum. They are of circular shape, as shown in FIG. 3, or have a lengthened shape parallel to the lines of the network as shown in FIG. 4 and are of very slight diameter or width. These diodes (suitably polarized by different frequency currents) form two sources of infrared rays R,R which pass through objective lens 14 to form real images of G times the smaller dimension. In order that the dimensions of these images on the network are less than or equal to a half-pace P/2 of the network 12, so that the images coming from the two diodes never cover two consecutive lines, the dimension of the sources must be equal to a value t/2 so that t= GP.

For another embodiment, the light source may be obtained by means of individual diodes associated with suitably shaped optical fibers for forming two slots-shaped sources.

To increase accuracy, it is desirable that the distance on the network of the images of the centers of the diodes or of the axes of the diodes, or else that the axes of the ends of the optical fibre bundles are staggered in a direction perpendicular to pace eventually increased by an entire number K of paces. For this, one selects the distance between the sources of the form 1/4 K 1.

During a relative movement of the scale 15 in relation to the sources 10,10 according to one of the directions shown by the arrow F, these images are successively reflected by each line of the network and the object 14 repeats them through the plate 13 by reflecting two successive images from whence one deduces the amplitude of the displacement knowing the pace P of the network 12.

FIG. 2 in which the elements dealing with a similar part have the same reference numerals, shows the arrangement when one applies the method by transmission or transparency. The images of the sources 10,10 are projected by a first objective 16 on to the network 12 of opaque lines, and the light passing through the space between two lines is transmitted by a second objective 17 which repeats an image of the sources on the photodiode ll of the receiving device R. The spaces are then counted separating two receptions of different modulation, which enables the displacement of the scale 15 to be ascertained.

The first method has the advantage of requiring less space, but both of these two methods can be used in the device according to the invention.

To increase the luminous flux and be able to get over any incidental irregularity of the network, due, for instance, to the presence of dust, it is advantageous to multiply the number of diodes of each pair of diodes I and 10.

This may be obtained, according to a first embodiment, by multiplying the number of pairs of diodes so as to form two assemblies I, ll of diodes, respectively comprising the diodes MB. and A,B, staggered by 1/4 Kt (FIG. whose images through the optical system are then staggered by g-i-KP;

each assembly has a frequency of different modulation, the diodes of assembly I being, for instance, modulated to say, by a quarter ofaregardto the circuit 26 receiving the Kc/s, those of the assembly II to 15 Kc/s.

This arrangement can be extended to an N number of assemblies forming images respectively staggered by K P 2 N and modulated to a different frequency.

According to another embodiment, the radiance emitted by one or more diodes modulated at one and the same frequency is transmitted on the network of lines by means of optical fibre bundle whose ends adjoining the network have a rectilinear section parallel to the lines of said network. Then, there is preferably used, the transmission method. FIG. 6 shows diagrammatically the arrangement of the beams of fibers Fotransmitting the light of two diodes or groups of diodes D D,, modulated at different frequencies, at a transmitting head T, which is arranged so as to be practically in contact with the network like the reading head of a magnetic recorder. Fibers F0 are aligned in the head T at their end, for instance according to four segments of straight lines parallel to the lines of the network shown by mixed lines. The diode D lights up the two segments A,, B,, and the diode D: the two segments A B In this method of fitting, the diodes can be of any shape and their dimensions can be much greater than the embodiments with an optical system of the kind of FIGS. 1 and 2. The diodes can also be placed in any position and indifferently in relation to each other. The dimension conditions to be compled with apply to the fibers which must have a diameter less than or equal to a half-pace P/2 of the network, and the segments A 8,, B A A B must be respectively equal to KP, K? P/4, KP, K is an entire number of paces equal to or different from K).

The electrical circuit diagram is shown in FIGS. 7, 9 and 10. In FIG. 7, l0 and 10' designate electroluminescent diodes biased with a direct current coming from a generator 22. Oscillators 20,20 respectively tuned, for in stance, to 10 Kc/S and 15 Kc/s supply the diodes 10,10 with sinusoidal current by means of amplifiers 21,21, respectively.

The modulated light beams R,R emitted by these diodes are received by the photodiode 11, after reflection or transmission by transparency by the network whose relative displacement requires to be measured, the photodiode 11 being biased with a direct voltage supplied by an auxiliary generator 22a.

The diode 11 is connected to an amplifier 24 followed by two band-pass filters 25,25 respectively tuned on the aforementioned frequencies of the oscillators 20,20. Detection and shaping circuits 26 and 26 provide low frequency signals A and B that will be referred to later on.

The sinusoidal-shaped luminous signals R and R, of respective frequencies 10 Kc/s and 15 Kc/s emitted by the diodes 10,10 are modified by the presence of each line of the netare respectively distant of P/4 (or I work encountered by these light beams which are received by the diode 11. The signals then have the appearance shown at A, B in FIG. 8.

After amplifying in the circuit 24, the signals A and B separated by the tuned filters 25,25 and are then detected and shaped by the circuits 26,26 at whose output the signals occur in the shape by the circuits shown at A and B in FIGS. 7 and 8.

One can also operate in squared signals for simplifying the shaping of the signals A and B as shown in FIG. 7a. The oscillators 20 and 20 are then square wave generators supplying the diodes l0 and 10. The square signals coming from the oscillators 20 and 20 are respectively applied on to the circuits 26 and 26 so as to effect a double synchronous detection.

One embodiment of a detector forming then the circuits 26 and are or synchronous demodulator 26 is shown in FIG. 7a with signal A. The detector is formed by a synchronous switch comprising two diodes 40, 41 connected to two filters RC 42, 43 and receiving by a transformer 44 the square carrier wave coming from the oscillator hence one immediately deduces the displacement direction.

This detecting of the displacement direction, designated in that which follows by the notation (AB)+ and (AB), can be effected by a logical device as shown in FIGS. 9 and 10.

The signals A and B are first of all applied to the circuit shown in FIG. 9, where 31-34 designate differentiating circuits forming the negative derivative of said signals A and B, and 35-36 designate inverting circuits. In this way, we obtain inverted signals I and at the output of the inverting circuits 35 and 36, as well as signals MA, NA and MB, NB at the output of the differentiating circuits, shown in FIG. 8, these signals corresponding to the sides of the signals A and B. By supposing that the succession in time of the signals A, B shown in FIG. 8, represents the positive displacement direction (AB)+, we can, for instance, characterize this direction by the logical relation:

(AB) (NA.1?+ MA.B)'+ (NB.A+ MBA and the other direction by:

The logical relations determined above are only given by way of examples and determine whether a derivative relating to a signal arrives or does not arrive on the phasemeter 27 in coincidence with the other signal.

The logical assembly effecting the preceding operations is shown in FIG. 10 where the various logical functions are carried out by gates AND and OR. The gates AND receive the signals A, 8,3. FNA, NB, MA, MB, coming from the circuit shown in FIG. 9. The respective outputs of the various gates AND are connected to the gates OR at whose output the signals (AB)+ and (AB are obtained.

The signals (AB)+ and (AB) thus obtained are applied respectively to the numbering and deducting of a reversible meter M which marks the movement with its sign.

A reversible meter of this kind can, for instance, be made like that described in the article Isobelt" by .I.A. GOSS in the Electronic Engineering" magazine, vol. 32, No. 392, of Oct. I960, or also as shown in FIG. 11 in which the signals (AB)+ and (AB) are received by means of forming devices 51 on an operating rocker 52 of a decade meter 53. The decade meter- 53 comprises gates AND 54, 55 and respectively 56, 57 connected, on the one hand, to one of outputs, respectively of the rocker 52 by conductors 59, 60, and on the other hand, to the conductors 61 and 62 of the signal input (AB)+ and AB respectively.

The outputs of said gates AND 54, 55 and 56, 57 are connected to the inputs of two recorders, or pulse counters 63, 54, respectively, of units, tens, etc.

Thus. according to the sign of the signal (AB)+ or (AB), the rocker 52 controls the numbering in the direct or retrograde direction.

FIG. 12 shows diagrammatically a practical example of mounting the optical elements using the method by reflection. A light source 71 comprising the diodes 10,10 and a photodetector 72 comprising the receiving diode 11 are placed at the top part of a casing 70. The beam of light, limited by a first diaphragm 73, passes through a prism 74 shuttering half of a second diaphragm 75 and directing the beam on to the objective 76. After reflecting on to the line network 12, the reflected beam is projected by the objective 76 and an auxiliary lens 77 on to the photodetector 72 connected to the circuit C described in the foregoing.

For eliminating parasite reflections of the light on the scale 15 formed by a glass slip which supports the network of lines 12, it is advantageous to cover this slip with an antireflecting coating also protecting the lines.

The invention is applicable to all devices necessitating the measuring of displacements or of effecting positionings with accuracy in spite of the presence of parasite vibrations: machine tools, analogic-to-numeric position converters, optical keys or stops, etc. the network being able to be movable in relation to the fixed light source or vice versa. Likewise, the scale 15 can be replaced by a disc on which the lines are arranged which can extend radially, said disc being supported by a shaft or spindle or else fixedly mounted.

Iclaim:

l. A photoelectric device for measuring relative displacement between a scale provided with equidistant lines substantially perpendicular to the direction of displacement and a beam of light projected onto the scale comprising at least one pair of electroluminescent diodes spaced apart a distance related to but different from the distance between the lines on said scale, means for modulating each diode of said at least one pair to form beams having two different modulated frequencies, means for projecting said pair of modulated beams in parallel relation onto the scale, photoelectric means for selectively receiving said beams after having been directed onto the scale in dependence upon whether said beams strike the scale at said lines or between said lines, means for filtering the beams received to separate the beams of different modulated frequencies, and means responsive to the filtered beams for detecting the direction and extent of relative displacement between the scale and the beams of incident light projected thereon.

2. A device as claimed in claim 1 wherein the width of each beam of light projected on the scale is less than half the distance between adjacent lines of the scale.

3. A device as claimed in claim 2 wherein the beams of light projected on the scale are separated a distance equal to V4 times the distance between adjacent lines of the scale plus a whole number times the distance between adjacent lines of the scale.

4. A device as claimed in claim 2 wherein each beam of light is derived from at least two electroluminescent diodes and the beams having the same modulated frequency being spaced a distance equal to the distance between adjacent lines of the scale divided by the number of diodes forming one beam plus a whole number times the distance between adjacent lines of the scale.

5. A device as claimed in claim 2 and further comprising a bundle of optical fibers for projecting said modulated beams onto the scale, the end of said bundle facing the scale having a rectilinear cross section parallel to the scale.

6. A device as claimed in claim 1 wherein said detecting means comprises an assembly of logical circuits and a reversible meter connected thereto. 

